Fused_Silica_(SiO2)_UHV_Viewport_EUV_Grade_1.88_Inch_View_4.50CF_304_ss.png

Fused_Silica_(SiO2)_UHV_Viewport_EUV_Grade_1.88_Inch_View_4.50CF_304_ss_cover.png

Fused_Silica_(SiO2)_UHV_Viewport_EUV_Grade_1.88_Inch_View_4.50CF_304_ss_cap.png

Fused_Silica_(SiO2)_UHV_Viewport_EUV_Grade_1.88_Inch_View_4.50CF_304_ss_collection.png

EUV 193nm Grade | 4.50CF | SiO-013

from $1,525.00

4.50CF 304ss | EUV 193nm Grade | Fused Silica (SiO2) UHV Viewport | 1.88 Inch View

This EUV 193nm VUV grade SiO2 UHV viewport has enhanced transmission from 193 nm in the ultraviolet to 2.2 microns in the infrared. The standard UHV mount is a 304 stainless steel 4.50" conflat flange. It is available with a protective anodized aluminum cap for improved thermal uniformity during bakeout. It is also available with a clear 6mm polycarbonate cover for safe viewing when the primary window is not in use. The threaded mount mates with the protective cap or safety cover using the SM2 Lens Tube System*.

Protection:

Both Safety Covers P/N SiO-013-1 Transparent Safety Cover | P/N SiO-013-2 Anodized Aluminum Bake-Out Cap | P/N SiO-013-3 No Protection | P/N SiO-013-4 No Threaded Attachment | P/N SiO-013-5

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Transmission Curve Material Properties SiO-013.step SiO-013.pdf

*Conveniently mates with SM2 Lens Tube System components

Patent Pending